Sensors Midwest 2017

The optical coherence tomography (OCT) was initially developed for medical applications. However, in the last decade the high resolution, OCT has found applications in many other fields including semiconductor metrology. At first, real space OCT system was applied, but now the frequency domain systems find their way in many industrial applications. One of the most recently invented systems is the Frequency Space Moire gauge which allows to measure arbitrary large distances with undiminished speed and accuracy. Attendees will learn the newest developments of OCT industrial metrology, and discuss practical design and manufacturing challenges of such sensors.