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Tuesday, October 3 • 1:00pm - 1:30pm
TECH3: Applications of Optical Coherence Tomography to Griding and Polishing and Position Sensing

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The optical coherence tomography (OCT) was initially developed for medical applications. However, in the last decade the high resolution, OCT has found applications in many other fields including semiconductor metrology. At first, real space OCT system was applied, but now the frequency domain systems find their way in many industrial applications. One of the most recently invented systems is the Frequency Space Moire gauge which allows to measure arbitrary large distances with undiminished speed and accuracy. Attendees will learn the newest developments of OCT industrial metrology, and discuss practical design and manufacturing challenges of such sensors.

avatar for Wojtek Walecki

Wojtek Walecki

CTO, Frontier Semiconductor
Wojtek J. Walecki received his Ph.D. In Physics and Masters in Engineering from Brown university in 1994 and 1992 respectively, and Master Degree in Physics from Warsaw University. He did his postdoctoral research at Cornell University. His academic interests were focused on ultrafast... Read More →

Tuesday October 3, 2017 1:00pm - 1:30pm CDT
Theater 2